High speed Si-waveguide coupled III-V photodetectors selectively grown on SOI by lateral MOCVD

Ying Xue; Yu Han; Yi Wang; Jie Li; Jingyi Wang; Zunyue Zhang; Xinlun Cai; Hon Ki Tsang; Kei May Lau

doi:10.1109/IPC53466.2022.9975698

High speed Si-waveguide coupled III-V photodetectors selectively grown on SOI by lateral MOCVD

Ying Xue, Yu Han, Yi Wang, Jie Li, Jingyi Wang, Zunyue Zhang, Xinlun Cai, Hon Ki Tsang, Kei May Lau^*

^*Corresponding author for this work

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

Abstract

We report Si-waveguide coupled III-V photodetectors selectively grown on industry-standard (001)-oriented silicon-on-insulator (SOI) wafers by lateral organic chemical vapor deposition (MOCVD). A low dark current of 60 pA, responsivities of 0.4 A/W at 1.3 μm and 0.2 A/W at 1.5 μm, a 3 dB bandwidth over 52 GHz and data communication rate of 96 Gb/s with PAM4 and 80 Gb/s with OOK were achieved.

Original language	English
Title of host publication	2022 IEEE Photonics Conference, IPC 2022 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781665434874
DOIs	https://doi.org/10.1109/IPC53466.2022.9975698
Publication status	Published - 2022
Event	2022 IEEE Photonics Conference, IPC 2022 - Vancouver, Canada Duration: 13 Nov 2022 → 17 Nov 2022

Publication series

Name	2022 IEEE Photonics Conference, IPC 2022 - Proceedings

Conference

Conference	2022 IEEE Photonics Conference, IPC 2022
Country/Territory	Canada
City	Vancouver
Period	13/11/22 → 17/11/22

Bibliographical note

Publisher Copyright:
© 2022 IEEE.

Keywords

high-speed
light coupling
monolithic integration

Access to Document

10.1109/IPC53466.2022.9975698

Cite this

Xue, Y., Han, Y., Wang, Y., Li, J., Wang, J., Zhang, Z., Cai, X., Tsang, H. K., & Lau, K. M. (2022). High speed Si-waveguide coupled III-V photodetectors selectively grown on SOI by lateral MOCVD. In 2022 IEEE Photonics Conference, IPC 2022 - Proceedings (2022 IEEE Photonics Conference, IPC 2022 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IPC53466.2022.9975698

@inproceedings{6e3f124b648a40ea8147e3b6d20ef4ed,

title = "High speed Si-waveguide coupled III-V photodetectors selectively grown on SOI by lateral MOCVD",

abstract = "We report Si-waveguide coupled III-V photodetectors selectively grown on industry-standard (001)-oriented silicon-on-insulator (SOI) wafers by lateral organic chemical vapor deposition (MOCVD). A low dark current of 60 pA, responsivities of 0.4 A/W at 1.3 μm and 0.2 A/W at 1.5 μm, a 3 dB bandwidth over 52 GHz and data communication rate of 96 Gb/s with PAM4 and 80 Gb/s with OOK were achieved.",

keywords = "high-speed, light coupling, monolithic integration",

author = "Ying Xue and Yu Han and Yi Wang and Jie Li and Jingyi Wang and Zunyue Zhang and Xinlun Cai and Tsang, \{Hon Ki\} and Lau, \{Kei May\}",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE Photonics Conference, IPC 2022 ; Conference date: 13-11-2022 Through 17-11-2022",

year = "2022",

doi = "10.1109/IPC53466.2022.9975698",

language = "English",

series = "2022 IEEE Photonics Conference, IPC 2022 - Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2022 IEEE Photonics Conference, IPC 2022 - Proceedings",

}

Xue, Y, Han, Y, Wang, Y, Li, J, Wang, J, Zhang, Z, Cai, X, Tsang, HK & Lau, KM 2022, High speed Si-waveguide coupled III-V photodetectors selectively grown on SOI by lateral MOCVD. in 2022 IEEE Photonics Conference, IPC 2022 - Proceedings. 2022 IEEE Photonics Conference, IPC 2022 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2022 IEEE Photonics Conference, IPC 2022, Vancouver, Canada, 13/11/22. https://doi.org/10.1109/IPC53466.2022.9975698

High speed Si-waveguide coupled III-V photodetectors selectively grown on SOI by lateral MOCVD. / Xue, Ying; Han, Yu; Wang, Yi et al.
2022 IEEE Photonics Conference, IPC 2022 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2022. (2022 IEEE Photonics Conference, IPC 2022 - Proceedings).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

TY - GEN

T1 - High speed Si-waveguide coupled III-V photodetectors selectively grown on SOI by lateral MOCVD

AU - Xue, Ying

AU - Han, Yu

AU - Wang, Yi

AU - Li, Jie

AU - Wang, Jingyi

AU - Zhang, Zunyue

AU - Cai, Xinlun

AU - Tsang, Hon Ki

AU - Lau, Kei May

PY - 2022

Y1 - 2022

N2 - We report Si-waveguide coupled III-V photodetectors selectively grown on industry-standard (001)-oriented silicon-on-insulator (SOI) wafers by lateral organic chemical vapor deposition (MOCVD). A low dark current of 60 pA, responsivities of 0.4 A/W at 1.3 μm and 0.2 A/W at 1.5 μm, a 3 dB bandwidth over 52 GHz and data communication rate of 96 Gb/s with PAM4 and 80 Gb/s with OOK were achieved.

AB - We report Si-waveguide coupled III-V photodetectors selectively grown on industry-standard (001)-oriented silicon-on-insulator (SOI) wafers by lateral organic chemical vapor deposition (MOCVD). A low dark current of 60 pA, responsivities of 0.4 A/W at 1.3 μm and 0.2 A/W at 1.5 μm, a 3 dB bandwidth over 52 GHz and data communication rate of 96 Gb/s with PAM4 and 80 Gb/s with OOK were achieved.

KW - high-speed

KW - light coupling

KW - monolithic integration

UR - https://openalex.org/W4311591832

UR - https://www.scopus.com/pages/publications/85145598363

U2 - 10.1109/IPC53466.2022.9975698

DO - 10.1109/IPC53466.2022.9975698

M3 - Conference Paper published in a book

T3 - 2022 IEEE Photonics Conference, IPC 2022 - Proceedings

BT - 2022 IEEE Photonics Conference, IPC 2022 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2022 IEEE Photonics Conference, IPC 2022

Y2 - 13 November 2022 through 17 November 2022

ER -

High speed Si-waveguide coupled III-V photodetectors selectively grown on SOI by lateral MOCVD

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