Highly-sensitive and low power SOI lateral thyristive magnetometer

Jack Lau*, Cuong T. Nguyen, Ping K. Ko, Philip C.H. Chan

*Corresponding author for this work

Research output: Contribution to journalConference article published in journalpeer-review

1 Citation (Scopus)

Abstract

We report here a lateral magnetometer fabricated on SOI using 6 masks. The sensor operates similar to a thyristor. With a supply voltage of 0.9 V and a total biasing current of 25 μA, the magnetometer achieves a relative sensitivity of 210%/Tesla and an absolute sensitivity of 105%/Tesla.

Original languageEnglish
Pages (from-to)143-146
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting, IEDM
Publication statusPublished - 1994
EventProceedings of the 1994 IEEE International Electron Devices Meeting - San Francisco, CA, USA
Duration: 11 Dec 199414 Dec 1994

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