Impact of Lateral Fin-Width Non-Uniformity of FinFETs

Mansun Chan; Clarissa Cyrilla Prawoto

Impact of Lateral Fin-Width Non-Uniformity of FinFETs

Mansun Chan
, Clarissa Cyrilla Prawoto

Department of Electronic and Computer Engineering

Research output: Contribution to conference › Conference Paper

Original language	English
Publication status	Published - Jan 2014
Event	EUROSOI 2014: 10th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circults - Duration: 1 Jan 2014 → 1 Jan 2014

Conference

Conference	EUROSOI 2014: 10th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circults
Period	1/01/14 → 1/01/14

Access to Document

https://hdl.handle.net/1783.1/66791

Cite this

@conference{1a12f7922ed243388400f4fb2e432838,

title = "Impact of Lateral Fin-Width Non-Uniformity of FinFETs",

author = "Mansun Chan and Prawoto, \{Clarissa Cyrilla\}",

year = "2014",

month = jan,

language = "English",

note = "EUROSOI 2014: 10th Workshop of the Thematic Network on Silicon on Insulator Technology, Devices and Circults ; Conference date: 01-01-2014 Through 01-01-2014",

}