Impact of Non-Vertical Sidewall on Sub-50 nm FinFET

Xusheng Wu^*, Philip C.H. Chan, Mansun Chan

^*Corresponding author for this work

Research output: Contribution to conference › Conference Paper › peer-review

14 Citations (Scopus)

Original language	English
Pages	151-152
Number of pages	2
Publication status	Published - 2003
Event	2003 IEEE International SOI Conference Proceedings - Newport Beach, CA, United States Duration: 29 Sept 2003 → 2 Oct 2003

Conference	2003 IEEE International SOI Conference Proceedings
Country/Territory	United States
City	Newport Beach, CA
Period	29/09/03 → 2/10/03

Cite this

TY - CONF

T1 - Impact of Non-Vertical Sidewall on Sub-50 nm FinFET

AU - Wu, Xusheng

AU - Chan, Philip C.H.

AU - Chan, Mansun

PY - 2003

Y1 - 2003

UR - https://www.scopus.com/pages/publications/0142248010

M3 - Conference Paper

AN - SCOPUS:0142248010

SP - 151

EP - 152

T2 - 2003 IEEE International SOI Conference Proceedings

Y2 - 29 September 2003 through 2 October 2003

ER -