Abstract
A new approach to reducing the source resistance in InP-based InAlAs/InGaAs enhancement-mode HEMTs is developed using Pt-based buried-gate technology. Source resistance as small as 0.2Ωmm is obtained, which results in an excellent transconductance of 1170 mS/mm for a 0.5μm long gate enhancement-mode HEMT.
| Original language | English |
|---|---|
| Pages (from-to) | 925-927 |
| Number of pages | 3 |
| Journal | Electronics Letters |
| Volume | 31 |
| Issue number | 11 |
| DOIs | |
| Publication status | Published - 25 May 1995 |
| Externally published | Yes |
Keywords
- High electron mobility transistors
- Indium phosphide