Improved source resistance in InP-based enhancement-modeHEMTs for high speed digital applications

K. J. Chen, K. Maezawa, K. Arai, M. Yamamoto, T. Enoki

Research output: Contribution to journalJournal Articlepeer-review

12 Citations (Scopus)

Abstract

A new approach to reducing the source resistance in InP-based InAlAs/InGaAs enhancement-mode HEMTs is developed using Pt-based buried-gate technology. Source resistance as small as 0.2Ωmm is obtained, which results in an excellent transconductance of 1170 mS/mm for a 0.5μm long gate enhancement-mode HEMT.

Original languageEnglish
Pages (from-to)925-927
Number of pages3
JournalElectronics Letters
Volume31
Issue number11
DOIs
Publication statusPublished - 25 May 1995
Externally publishedYes

Keywords

  • High electron mobility transistors
  • Indium phosphide

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