Improving the SiO2/polycrystalline SiGe Interface Using Sputtered SiO2 abd Its Application in TFT

G.A. Bhat, Z.H. Jin, M. Wong, M. Yeung, Hoi Sing Kwok

Research output: Contribution to conference › Conference Paper

Original language	English
Pages	239-243
Publication status	Published - Jan 1997
Event	IDW '97 : proceedings of the fourth International Display Workshops - Duration: 1 Jan 1997 → 1 Jan 1997

Conference	IDW '97 : proceedings of the fourth International Display Workshops
Period	1/01/97 → 1/01/97

Access to Document

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title = "Improving the SiO2/polycrystalline SiGe Interface Using Sputtered SiO2 abd Its Application in TFT",

author = "G.A. Bhat and Z.H. Jin and M. Wong and M. Yeung and Kwok, \{Hoi Sing\}",

year = "1997",

month = jan,

language = "English",

pages = "239--243",

note = "IDW '97 : proceedings of the fourth International Display Workshops ; Conference date: 01-01-1997 Through 01-01-1997",

}

TY - CONF

T1 - Improving the SiO2/polycrystalline SiGe Interface Using Sputtered SiO2 abd Its Application in TFT

AU - Bhat, G.A.

AU - Jin, Z.H.

AU - Wong, M.

AU - Yeung, M.

AU - Kwok, Hoi Sing

PY - 1997/1

Y1 - 1997/1

M3 - Conference Paper

SP - 239

EP - 243

T2 - IDW '97 : proceedings of the fourth International Display Workshops

Y2 - 1 January 1997 through 1 January 1997

ER -