Integrated microgiant electrorheological fluid valves for microflow cytometry

Yun Yang Ling; Yechi Zhang; Weijia Wen; Patrick Tabeling; Yi Kuen Lee

doi:10.1117/1.3124191

Integrated microgiant electrorheological fluid valves for microflow cytometry

Yun Yang Ling^*, Yechi Zhang, Weijia Wen, Patrick Tabeling, Yi Kuen Lee

^*Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

7 Citations (Scopus)

Abstract

We present the fabrication and optimization of new integrated microgiant electrorheological (GER) valves for microflow cytometry. Compared to previous GER valves, new GER valves, consisting of an SU-8 layer, a PDMS membrane, and glass layers, were fabricated by 4-mask microelectromechanical systems technology and two new packaging methods. This design enabled good bonding and fluidic interconnection. The thickness of the PDMS membrane was designed such that the membrane deformation was large enough that the cytometry channel was well sealed. The interfacial stress between the PDMS and the PDMS/SU-8 as a function of vacuum plasma treatment time was investigated in detail. The switching behavior of the GER valves was also analyzed and characterized using fluorescence microscopy.

Original language	English
Article number	021103
Journal	Journal of Micro/Nanolithography, MEMS, and MOEMS
Volume	8
Issue number	2
DOIs	https://doi.org/10.1117/1.3124191
Publication status	Published - 2009

Keywords

Electrorheological fluid
GER fluid
Microvalves
PDMS
SU-8

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10.1117/1.3124191

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title = "Integrated microgiant electrorheological fluid valves for microflow cytometry",

abstract = "We present the fabrication and optimization of new integrated microgiant electrorheological (GER) valves for microflow cytometry. Compared to previous GER valves, new GER valves, consisting of an SU-8 layer, a PDMS membrane, and glass layers, were fabricated by 4-mask microelectromechanical systems technology and two new packaging methods. This design enabled good bonding and fluidic interconnection. The thickness of the PDMS membrane was designed such that the membrane deformation was large enough that the cytometry channel was well sealed. The interfacial stress between the PDMS and the PDMS/SU-8 as a function of vacuum plasma treatment time was investigated in detail. The switching behavior of the GER valves was also analyzed and characterized using fluorescence microscopy.",

keywords = "Electrorheological fluid, GER fluid, Microvalves, PDMS, SU-8",

author = "Ling, \{Yun Yang\} and Yechi Zhang and Weijia Wen and Patrick Tabeling and Lee, \{Yi Kuen\}",

year = "2009",

doi = "10.1117/1.3124191",

language = "English",

volume = "8",

journal = "Journal of Micro/Nanolithography, MEMS, and MOEMS",

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TY - JOUR

T1 - Integrated microgiant electrorheological fluid valves for microflow cytometry

AU - Ling, Yun Yang

AU - Zhang, Yechi

AU - Wen, Weijia

AU - Tabeling, Patrick

AU - Lee, Yi Kuen

PY - 2009

Y1 - 2009

N2 - We present the fabrication and optimization of new integrated microgiant electrorheological (GER) valves for microflow cytometry. Compared to previous GER valves, new GER valves, consisting of an SU-8 layer, a PDMS membrane, and glass layers, were fabricated by 4-mask microelectromechanical systems technology and two new packaging methods. This design enabled good bonding and fluidic interconnection. The thickness of the PDMS membrane was designed such that the membrane deformation was large enough that the cytometry channel was well sealed. The interfacial stress between the PDMS and the PDMS/SU-8 as a function of vacuum plasma treatment time was investigated in detail. The switching behavior of the GER valves was also analyzed and characterized using fluorescence microscopy.

AB - We present the fabrication and optimization of new integrated microgiant electrorheological (GER) valves for microflow cytometry. Compared to previous GER valves, new GER valves, consisting of an SU-8 layer, a PDMS membrane, and glass layers, were fabricated by 4-mask microelectromechanical systems technology and two new packaging methods. This design enabled good bonding and fluidic interconnection. The thickness of the PDMS membrane was designed such that the membrane deformation was large enough that the cytometry channel was well sealed. The interfacial stress between the PDMS and the PDMS/SU-8 as a function of vacuum plasma treatment time was investigated in detail. The switching behavior of the GER valves was also analyzed and characterized using fluorescence microscopy.

KW - Electrorheological fluid

KW - GER fluid

KW - Microvalves

KW - PDMS

KW - SU-8

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UR - https://openalex.org/W2103495437

UR - https://www.scopus.com/pages/publications/78649280802

U2 - 10.1117/1.3124191

DO - 10.1117/1.3124191

M3 - Journal Article

SN - 1932-5150

VL - 8

JO - Journal of Micro/Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/Nanolithography, MEMS, and MOEMS

IS - 2

M1 - 021103

ER -

Integrated microgiant electrorheological fluid valves for microflow cytometry

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