Abstract
This paper presents the characteristics of composite multilayer metallization after high temperature sintering for the purpose of fabricating integrated gas sensors. Several types of composite multilayer metal electrodes such as Au/Ti/Al/Ti-W (200/50/600/500nm), Au/Cr/Al/Ti-W (250/50/600/50nm), Au/Ti-W, Au/Ti, and Au/Pt/Ti or Pt/Ti were investigated. Spikes or hillocks on the surface of the composite multilayer metal electrodes after high temperature sintering are analyzed with microscopy and XPS. Based on this investigation, we have determined which multilayer metal system is most suitable for high temperature applications.
| Original language | English |
|---|---|
| Publication status | Published - 2000 |
| Event | International Symposium on Smart Structures & Microsystems - Duration: 1 Jan 2000 → 1 Jan 2000 |
Conference
| Conference | International Symposium on Smart Structures & Microsystems |
|---|---|
| Period | 1/01/00 → 1/01/00 |
Keywords
- Composite multilayer metallization
- High temperature sintering
- Integrated gas sensors
- Sintering
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