Large form birefringence realized by dielectric subwavelength grating

Dunhang Quan; Hao Jia; Weihao Li; Xing Cheng; Hoi Sing Kwok

doi:10.1002/sdtp.13123

Large form birefringence realized by dielectric subwavelength grating

Dunhang Quan, Hao Jia, Weihao Li, Xing Cheng, Hoi Sing Kwok

Department of Electronic and Computer Engineering

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

2 Citations (Scopus)

Abstract

We present a detailed investigation of form birefringence realized by subwavelength grating based on high refractive index dielectric materials, e.g. titanium dioxide. The anticipated degree of birefringence is evaluated using Finite-Difference Time-Domain simulation of designed optical structure and in good accordance with the theoretical prediction. The designed subwavelength grating was fabricated using electron beam lithography and subsequent ICP dry etching technique on fused silica substrate. The artificial grating was then characterized under SEM and AFM, and a large birefringence 0.33 was obtained which can be furtherly improved with deposition process optimization.

Original language	English
Title of host publication	Digest of Technical Papers - SID International Symposium
Editors	Kelly Jean Fitzsimmons
Publisher	John Wiley and Sons Inc
Pages	1110-1113
Number of pages	4
Edition	Book 2
ISBN (Electronic)	9781510896161, 9781510896161, 9781510896161
DOIs	https://doi.org/10.1002/sdtp.13123
Publication status	Published - 2019
Event	SID Symposium, Seminar, and Exhibition 2019, Display Week 2019 - San Jose, United States Duration: 12 May 2019 → 17 May 2019

Publication series

Name	Digest of Technical Papers - SID International Symposium
Number	Book 2
Volume	50
ISSN (Print)	0097-966X
ISSN (Electronic)	2168-0159

Conference

Conference	SID Symposium, Seminar, and Exhibition 2019, Display Week 2019
Country/Territory	United States
City	San Jose
Period	12/05/19 → 17/05/19

Bibliographical note

Publisher Copyright:
© 2019 SID-the Society for Information Display. All rights reserved.

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

FDTD simulation
Form birefringence
Nanofabrication
Subwavelength grating
Titanium dioxide

Access to Document

10.1002/sdtp.13123

Cite this

Quan, D., Jia, H., Li, W., Cheng, X., & Kwok, H. S. (2019). Large form birefringence realized by dielectric subwavelength grating. In K. J. Fitzsimmons (Ed.), Digest of Technical Papers - SID International Symposium (Book 2 ed., pp. 1110-1113). (Digest of Technical Papers - SID International Symposium; Vol. 50, No. Book 2). John Wiley and Sons Inc. https://doi.org/10.1002/sdtp.13123

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title = "Large form birefringence realized by dielectric subwavelength grating",

abstract = "We present a detailed investigation of form birefringence realized by subwavelength grating based on high refractive index dielectric materials, e.g. titanium dioxide. The anticipated degree of birefringence is evaluated using Finite-Difference Time-Domain simulation of designed optical structure and in good accordance with the theoretical prediction. The designed subwavelength grating was fabricated using electron beam lithography and subsequent ICP dry etching technique on fused silica substrate. The artificial grating was then characterized under SEM and AFM, and a large birefringence 0.33 was obtained which can be furtherly improved with deposition process optimization.",

keywords = "FDTD simulation, Form birefringence, Nanofabrication, Subwavelength grating, Titanium dioxide",

author = "Dunhang Quan and Hao Jia and Weihao Li and Xing Cheng and Kwok, \{Hoi Sing\}",

note = "Publisher Copyright: {\textcopyright} 2019 SID-the Society for Information Display. All rights reserved.; SID Symposium, Seminar, and Exhibition 2019, Display Week 2019 ; Conference date: 12-05-2019 Through 17-05-2019",

year = "2019",

doi = "10.1002/sdtp.13123",

language = "English",

series = "Digest of Technical Papers - SID International Symposium",

publisher = "John Wiley and Sons Inc",

number = "Book 2",

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editor = "Fitzsimmons, \{Kelly Jean\}",

booktitle = "Digest of Technical Papers - SID International Symposium",

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}

Quan, D, Jia, H, Li, W, Cheng, X & Kwok, HS 2019, Large form birefringence realized by dielectric subwavelength grating. in KJ Fitzsimmons (ed.), Digest of Technical Papers - SID International Symposium. Book 2 edn, Digest of Technical Papers - SID International Symposium, no. Book 2, vol. 50, John Wiley and Sons Inc, pp. 1110-1113, SID Symposium, Seminar, and Exhibition 2019, Display Week 2019, San Jose, United States, 12/05/19. https://doi.org/10.1002/sdtp.13123

Large form birefringence realized by dielectric subwavelength grating. / Quan, Dunhang; Jia, Hao; Li, Weihao et al.
Digest of Technical Papers - SID International Symposium. ed. / Kelly Jean Fitzsimmons. Book 2. ed. John Wiley and Sons Inc, 2019. p. 1110-1113 (Digest of Technical Papers - SID International Symposium; Vol. 50, No. Book 2).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

TY - GEN

T1 - Large form birefringence realized by dielectric subwavelength grating

AU - Quan, Dunhang

AU - Jia, Hao

AU - Li, Weihao

AU - Cheng, Xing

AU - Kwok, Hoi Sing

PY - 2019

Y1 - 2019

N2 - We present a detailed investigation of form birefringence realized by subwavelength grating based on high refractive index dielectric materials, e.g. titanium dioxide. The anticipated degree of birefringence is evaluated using Finite-Difference Time-Domain simulation of designed optical structure and in good accordance with the theoretical prediction. The designed subwavelength grating was fabricated using electron beam lithography and subsequent ICP dry etching technique on fused silica substrate. The artificial grating was then characterized under SEM and AFM, and a large birefringence 0.33 was obtained which can be furtherly improved with deposition process optimization.

AB - We present a detailed investigation of form birefringence realized by subwavelength grating based on high refractive index dielectric materials, e.g. titanium dioxide. The anticipated degree of birefringence is evaluated using Finite-Difference Time-Domain simulation of designed optical structure and in good accordance with the theoretical prediction. The designed subwavelength grating was fabricated using electron beam lithography and subsequent ICP dry etching technique on fused silica substrate. The artificial grating was then characterized under SEM and AFM, and a large birefringence 0.33 was obtained which can be furtherly improved with deposition process optimization.

KW - FDTD simulation

KW - Form birefringence

KW - Nanofabrication

KW - Subwavelength grating

KW - Titanium dioxide

UR - https://openalex.org/W2947790408

UR - https://www.scopus.com/pages/publications/85081156104

U2 - 10.1002/sdtp.13123

DO - 10.1002/sdtp.13123

M3 - Conference Paper published in a book

T3 - Digest of Technical Papers - SID International Symposium

SP - 1110

EP - 1113

BT - Digest of Technical Papers - SID International Symposium

A2 - Fitzsimmons, Kelly Jean

PB - John Wiley and Sons Inc

T2 - SID Symposium, Seminar, and Exhibition 2019, Display Week 2019

Y2 - 12 May 2019 through 17 May 2019

ER -

Large form birefringence realized by dielectric subwavelength grating

Abstract

Publication series

Conference

Bibliographical note

UN SDGs

Keywords

Access to Document

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