Lithium niobate MEMS devices and subsystems for radio frequency signal processing

Songbin Gong; Yong Ha Song; Tomas Manzaneque; Ruochen Lu; Yansong Yang; Ali Kourani

doi:10.1109/MWSCAS.2017.8052856

Lithium niobate MEMS devices and subsystems for radio frequency signal processing

Songbin Gong, Yong Ha Song, Tomas Manzaneque, Ruochen Lu, Yansong Yang, Ali Kourani

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

17 Citations (Scopus)

Abstract

This paper presents a review of the recent advances in Lithium Niobate (LiNbOa) micro-electro-mechanical systems (MEMS). Several types of devices and subsystems, including resonators, transformers, filters, and delay lines are discussed, targeting the different functions that are currently sought after in radio frequency signal processing for various existing and emerging applications. Technical challenges that remain in the path of deploying these devices are also summarized with a few suggested future research directions.

Original language	English
Title of host publication	2017 IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	45-48
Number of pages	4
ISBN (Electronic)	9781509063895
DOIs	https://doi.org/10.1109/MWSCAS.2017.8052856
Publication status	Published - 27 Sept 2017
Externally published	Yes
Event	60th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2017 - Boston, United States Duration: 6 Aug 2017 → 9 Aug 2017

Publication series

Name	Midwest Symposium on Circuits and Systems
Volume	2017-August
ISSN (Print)	1548-3746

Conference

Conference	60th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2017
Country/Territory	United States
City	Boston
Period	6/08/17 → 9/08/17

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

Keywords

Internet of Things
Lithium niobate
MEMS
RF
VCO

Access to Document

10.1109/MWSCAS.2017.8052856

Cite this

Gong, S., Song, Y. H., Manzaneque, T., Lu, R., Yang, Y., & Kourani, A. (2017). Lithium niobate MEMS devices and subsystems for radio frequency signal processing. In 2017 IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017 (pp. 45-48). Article 8052856 (Midwest Symposium on Circuits and Systems; Vol. 2017-August). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MWSCAS.2017.8052856

@inproceedings{53fc214d9ccc4ed382c73ceda2def557,

title = "Lithium niobate MEMS devices and subsystems for radio frequency signal processing",

abstract = "This paper presents a review of the recent advances in Lithium Niobate (LiNbOa) micro-electro-mechanical systems (MEMS). Several types of devices and subsystems, including resonators, transformers, filters, and delay lines are discussed, targeting the different functions that are currently sought after in radio frequency signal processing for various existing and emerging applications. Technical challenges that remain in the path of deploying these devices are also summarized with a few suggested future research directions.",

keywords = "Internet of Things, Lithium niobate, MEMS, RF, VCO",

author = "Songbin Gong and Song, \{Yong Ha\} and Tomas Manzaneque and Ruochen Lu and Yansong Yang and Ali Kourani",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 60th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2017 ; Conference date: 06-08-2017 Through 09-08-2017",

year = "2017",

month = sep,

day = "27",

doi = "10.1109/MWSCAS.2017.8052856",

language = "English",

series = "Midwest Symposium on Circuits and Systems",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "45--48",

booktitle = "2017 IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017",

}

Gong, S, Song, YH, Manzaneque, T, Lu, R, Yang, Y & Kourani, A 2017, Lithium niobate MEMS devices and subsystems for radio frequency signal processing. in 2017 IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017., 8052856, Midwest Symposium on Circuits and Systems, vol. 2017-August, Institute of Electrical and Electronics Engineers Inc., pp. 45-48, 60th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2017, Boston, United States, 6/08/17. https://doi.org/10.1109/MWSCAS.2017.8052856

Lithium niobate MEMS devices and subsystems for radio frequency signal processing. / Gong, Songbin; Song, Yong Ha; Manzaneque, Tomas et al.
2017 IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 45-48 8052856 (Midwest Symposium on Circuits and Systems; Vol. 2017-August).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

TY - GEN

T1 - Lithium niobate MEMS devices and subsystems for radio frequency signal processing

AU - Gong, Songbin

AU - Song, Yong Ha

AU - Manzaneque, Tomas

AU - Lu, Ruochen

AU - Yang, Yansong

AU - Kourani, Ali

PY - 2017/9/27

Y1 - 2017/9/27

N2 - This paper presents a review of the recent advances in Lithium Niobate (LiNbOa) micro-electro-mechanical systems (MEMS). Several types of devices and subsystems, including resonators, transformers, filters, and delay lines are discussed, targeting the different functions that are currently sought after in radio frequency signal processing for various existing and emerging applications. Technical challenges that remain in the path of deploying these devices are also summarized with a few suggested future research directions.

AB - This paper presents a review of the recent advances in Lithium Niobate (LiNbOa) micro-electro-mechanical systems (MEMS). Several types of devices and subsystems, including resonators, transformers, filters, and delay lines are discussed, targeting the different functions that are currently sought after in radio frequency signal processing for various existing and emerging applications. Technical challenges that remain in the path of deploying these devices are also summarized with a few suggested future research directions.

KW - Internet of Things

KW - Lithium niobate

KW - MEMS

KW - RF

KW - VCO

UR - https://openalex.org/W2756657455

UR - https://www.scopus.com/pages/publications/85034026689

U2 - 10.1109/MWSCAS.2017.8052856

DO - 10.1109/MWSCAS.2017.8052856

M3 - Conference Paper published in a book

T3 - Midwest Symposium on Circuits and Systems

SP - 45

EP - 48

BT - 2017 IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 60th IEEE International Midwest Symposium on Circuits and Systems, MWSCAS 2017

Y2 - 6 August 2017 through 9 August 2017

ER -

Gong S, Song YH, Manzaneque T, Lu R, Yang Y, Kourani A. Lithium niobate MEMS devices and subsystems for radio frequency signal processing. In 2017 IEEE 60th International Midwest Symposium on Circuits and Systems, MWSCAS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 45-48. 8052856. (Midwest Symposium on Circuits and Systems). doi: 10.1109/MWSCAS.2017.8052856

Lithium niobate MEMS devices and subsystems for radio frequency signal processing

Abstract

Publication series

Conference

Bibliographical note

Keywords

Access to Document

Other files and links

Fingerprint

Cite this