Mosaic diamond disks with brazed pallets for CMP

Ying Tung Chen; Chen Chin Yu; Cheng Shiang Chou; Chih Chung Chou; Yang Liang Pai; Zongqing Yang; Mu Han Cheng; Tien Chen Hu; Michael Sung; James C. Sung

doi:10.4028/www.scientific.net/AMR.126-128.332

Mosaic diamond disks with brazed pallets for CMP

Ying Tung Chen^*, Chen Chin Yu, Cheng Shiang Chou, Chih Chung Chou, Yang Liang Pai, Zongqing Yang, Mu Han Cheng, Tien Chen Hu, Michael Sung, James C. Sung

^*Corresponding author for this work

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

Abstract

Diamond disks are indispensable for dressing CMP pads in the manufacture of semiconductors. Conventional diamond disks contain one type of diamond grits, with the aim to achieve two different functions, viz. glaze shaving and asperities grooving. Cocktail diamond disks are made by assembling brazed diamond pallets that contain different types of diamond crystals. Thus, the pad can be dressed clean, and at the same time, asperities may polish wafers fast without damaging

Original language	English
Title of host publication	Advances in Abrasive Technology XIII
Pages	332-337
Number of pages	6
DOIs	https://doi.org/10.4028/www.scientific.net/AMR.126-128.332
Publication status	Published - 2010
Externally published	Yes
Event	13th International Symposium on Advances in Abrasive Technology, ISAAT2010 - Taipei, Taiwan, Province of China Duration: 19 Sept 2010 → 22 Sept 2010

Publication series

Name	Advanced Materials Research
Volume	126-128
ISSN (Print)	1022-6680

Conference

Conference	13th International Symposium on Advances in Abrasive Technology, ISAAT2010
Country/Territory	Taiwan, Province of China
City	Taipei
Period	19/09/10 → 22/09/10

Keywords

CMP
Diamond disk
Pad conditioner
Semiconductor

Access to Document

10.4028/www.scientific.net/AMR.126-128.332

Cite this

@inproceedings{946cda74f6b5463db4e9617d734a196f,

title = "Mosaic diamond disks with brazed pallets for CMP",

abstract = "Diamond disks are indispensable for dressing CMP pads in the manufacture of semiconductors. Conventional diamond disks contain one type of diamond grits, with the aim to achieve two different functions, viz. glaze shaving and asperities grooving. Cocktail diamond disks are made by assembling brazed diamond pallets that contain different types of diamond crystals. Thus, the pad can be dressed clean, and at the same time, asperities may polish wafers fast without damaging",

keywords = "CMP, Diamond disk, Pad conditioner, Semiconductor",

author = "Chen, \{Ying Tung\} and Yu, \{Chen Chin\} and Chou, \{Cheng Shiang\} and Chou, \{Chih Chung\} and Pai, \{Yang Liang\} and Zongqing Yang and Cheng, \{Mu Han\} and Hu, \{Tien Chen\} and Michael Sung and Sung, \{James C.\}",

year = "2010",

doi = "10.4028/www.scientific.net/AMR.126-128.332",

language = "English",

isbn = "9780878492428",

series = "Advanced Materials Research",

pages = "332--337",

booktitle = "Advances in Abrasive Technology XIII",

note = "13th International Symposium on Advances in Abrasive Technology, ISAAT2010 ; Conference date: 19-09-2010 Through 22-09-2010",

}

Chen, YT, Yu, CC, Chou, CS, Chou, CC, Pai, YL, Yang, Z, Cheng, MH, Hu, TC, Sung, M & Sung, JC 2010, Mosaic diamond disks with brazed pallets for CMP. in Advances in Abrasive Technology XIII. Advanced Materials Research, vol. 126-128, pp. 332-337, 13th International Symposium on Advances in Abrasive Technology, ISAAT2010, Taipei, Taiwan, Province of China, 19/09/10. https://doi.org/10.4028/www.scientific.net/AMR.126-128.332

TY - GEN

T1 - Mosaic diamond disks with brazed pallets for CMP

AU - Chen, Ying Tung

AU - Yu, Chen Chin

AU - Chou, Cheng Shiang

AU - Chou, Chih Chung

AU - Pai, Yang Liang

AU - Yang, Zongqing

AU - Cheng, Mu Han

AU - Hu, Tien Chen

AU - Sung, Michael

AU - Sung, James C.

PY - 2010

Y1 - 2010

N2 - Diamond disks are indispensable for dressing CMP pads in the manufacture of semiconductors. Conventional diamond disks contain one type of diamond grits, with the aim to achieve two different functions, viz. glaze shaving and asperities grooving. Cocktail diamond disks are made by assembling brazed diamond pallets that contain different types of diamond crystals. Thus, the pad can be dressed clean, and at the same time, asperities may polish wafers fast without damaging

AB - Diamond disks are indispensable for dressing CMP pads in the manufacture of semiconductors. Conventional diamond disks contain one type of diamond grits, with the aim to achieve two different functions, viz. glaze shaving and asperities grooving. Cocktail diamond disks are made by assembling brazed diamond pallets that contain different types of diamond crystals. Thus, the pad can be dressed clean, and at the same time, asperities may polish wafers fast without damaging

KW - CMP

KW - Diamond disk

KW - Pad conditioner

KW - Semiconductor

UR - https://www.scopus.com/pages/publications/78650941514

U2 - 10.4028/www.scientific.net/AMR.126-128.332

DO - 10.4028/www.scientific.net/AMR.126-128.332

M3 - Conference Paper published in a book

AN - SCOPUS:78650941514

SN - 9780878492428

T3 - Advanced Materials Research

SP - 332

EP - 337

BT - Advances in Abrasive Technology XIII

T2 - 13th International Symposium on Advances in Abrasive Technology, ISAAT2010

Y2 - 19 September 2010 through 22 September 2010

ER -

Mosaic diamond disks with brazed pallets for CMP

Abstract

Publication series

Conference

Keywords

Access to Document

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