Nano-frictional Behaviors on Etched Silicon (100) Surfaces

Haifei Bao; Yuelin Wang; Bin Xiong; Deren Lu; Weiyuan Wang; Tongyi Zhang

doi:10.1515/IJNSNS.2002.3.3-4.523

Nano-frictional Behaviors on Etched Silicon (100) Surfaces

Haifei Bao^*
, Yuelin Wang
, Bin Xiong
, Deren Lu
, Weiyuan Wang
, Tongyi Zhang

^*Corresponding author for this work

Department of Mechanical and Aerospace Engineering

Research output: Contribution to journal › Journal Article › peer-review

1 Citation (Scopus)

Abstract

Micro or nano-friction is closely related with surface morphologies. In this paper, different surface morphologies with nano roughnesses were obtained on silicon(100) surfaces by using KOH etchant. Friction measurements in AFM/FFM show that linear behavior, Hertzian-contact elastic behavior and superlinear behavior between friction and load on different samples were observed at low nano loads. Investigations on different samples show that frictional behaviors depend strongly on the surface morphologies.

Original language	English
Pages (from-to)	523-526
Number of pages	4
Journal	International Journal of Nonlinear Sciences and Numerical Simulation
Volume	3
Issue number	3-4
DOIs	https://doi.org/10.1515/IJNSNS.2002.3.3-4.523
Publication status	Published - 1 Dec 2002

Keywords

Nanofriction
Silicon
Roughness
Etching
MEMS

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10.1515/IJNSNS.2002.3.3-4.523

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title = "Nano-frictional Behaviors on Etched Silicon (100) Surfaces",

abstract = "Micro or nano-friction is closely related with surface morphologies. In this paper, different surface morphologies with nano roughnesses were obtained on silicon(100) surfaces by using KOH etchant. Friction measurements in AFM/FFM show that linear behavior, Hertzian-contact elastic behavior and superlinear behavior between friction and load on different samples were observed at low nano loads. Investigations on different samples show that frictional behaviors depend strongly on the surface morphologies.",

keywords = "Nanofriction, Silicon, Roughness, Etching, MEMS",

author = "Haifei Bao and Yuelin Wang and Bin Xiong and Deren Lu and Weiyuan Wang and Tongyi Zhang",

year = "2002",

month = dec,

day = "1",

doi = "10.1515/IJNSNS.2002.3.3-4.523",

language = "English",

volume = "3",

pages = "523--526",

journal = "International Journal of Nonlinear Sciences and Numerical Simulation",

issn = "1565-1339",

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TY - JOUR

T1 - Nano-frictional Behaviors on Etched Silicon (100) Surfaces

AU - Bao, Haifei

AU - Wang, Yuelin

AU - Xiong, Bin

AU - Lu, Deren

AU - Wang, Weiyuan

AU - Zhang, Tongyi

PY - 2002/12/1

Y1 - 2002/12/1

N2 - Micro or nano-friction is closely related with surface morphologies. In this paper, different surface morphologies with nano roughnesses were obtained on silicon(100) surfaces by using KOH etchant. Friction measurements in AFM/FFM show that linear behavior, Hertzian-contact elastic behavior and superlinear behavior between friction and load on different samples were observed at low nano loads. Investigations on different samples show that frictional behaviors depend strongly on the surface morphologies.

AB - Micro or nano-friction is closely related with surface morphologies. In this paper, different surface morphologies with nano roughnesses were obtained on silicon(100) surfaces by using KOH etchant. Friction measurements in AFM/FFM show that linear behavior, Hertzian-contact elastic behavior and superlinear behavior between friction and load on different samples were observed at low nano loads. Investigations on different samples show that frictional behaviors depend strongly on the surface morphologies.

KW - Nanofriction

KW - Silicon

KW - Roughness

KW - Etching

KW - MEMS

UR - https://www.scopus.com/pages/publications/0036319784

U2 - 10.1515/IJNSNS.2002.3.3-4.523

DO - 10.1515/IJNSNS.2002.3.3-4.523

M3 - Journal Article

SN - 1565-1339

VL - 3

SP - 523

EP - 526

JO - International Journal of Nonlinear Sciences and Numerical Simulation

JF - International Journal of Nonlinear Sciences and Numerical Simulation

IS - 3-4

ER -

Nano-frictional Behaviors on Etched Silicon (100) Surfaces

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Keywords

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