Nucleation and growth of Si nanowires from silicon oxide

N. Wang, Y. Tang, Y. Zhang, C. Lee, S. Lee

Research output: Contribution to journalJournal Articlepeer-review

357 Citations (Scopus)

Abstract

Nucleation and growth of Si nanowires by laser ablation and thermal evaporation of Si powder sources mixed with (Formula presented) have been investigated by means of transmission electron microscopy. At the initial nucleation stage, Si oxide vapor condensed on the substrate and formed Si nanoparticles (the nuclei of nanowires). Each Si nanowire nucleus consisted of a polycrystalline Si core containing a high density of defects and a Si oxide shell. A growth mechanism was proposed based on the microstructure and different morphologies of the Si nanowires observed.

Original languageEnglish
Pages (from-to)R16024-R16026
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume58
Issue number24
DOIs
Publication statusPublished - 1998
Externally publishedYes

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