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Passivation of Poly-Si Thin Film Employing Si Self-Implantation and Its Application to TFTs

  • Rongsheng Chen
  • , Wei Zhou*
  • , Sunbin Deng
  • , Meng Zhang
  • , Man Wong
  • , Hoi Sing Kwok
  • *Corresponding author for this work

Research output: Contribution to journal › Journal Article › peer-review

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