Physical modeling of spiral inductors on silicon

C. Patrick Yue, S. Simon Wong

Research output: Contribution to journalJournal Articlepeer-review

Abstract

This paper presents a physical model for planar spiral inductors on silicon, which accounts for eddy current effect in the conductor, crossover capacitance between the spiral and center-tap, capacitance between the spiral and substrate, substrate ohmic loss, and substrate capacitance. The model has been confirmed with measured results of inductors having a wide range of layout and process parameters. This scalable inductor model enables the prediction and optimization of inductor performance.

Original languageEnglish
Pages (from-to)560-568
Number of pages9
JournalIEEE Transactions on Electron Devices
Volume47
Issue number3
DOIs
Publication statusPublished - 2000
Externally publishedYes

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