Abstract
This paper presents a physical model for planar spiral inductors on silicon, which accounts for eddy current effect in the conductor, crossover capacitance between the spiral and center-tap, capacitance between the spiral and substrate, substrate ohmic loss, and substrate capacitance. The model has been confirmed with measured results of inductors having a wide range of layout and process parameters. This scalable inductor model enables the prediction and optimization of inductor performance.
| Original language | English |
|---|---|
| Pages (from-to) | 560-568 |
| Number of pages | 9 |
| Journal | IEEE Transactions on Electron Devices |
| Volume | 47 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2000 |
| Externally published | Yes |
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