Piezoresistive Pressure Sensor Using Metal-Induced Laterally Crystallized Polycrystalline Silicon

Gang Li; Man Wong; Yitshak Zohar

Piezoresistive Pressure Sensor Using Metal-Induced Laterally Crystallized Polycrystalline Silicon

Gang Li, Man Wong, Yitshak Zohar

The Hong Kong University of Science and Technology

Research output: Contribution to conference › Conference Paper

Original language	English
Publication status	Published - 2004
Event	The Asia-Pacific Conference of Tranducers and Micro-Nano Technology (APCOT MNT), Sapporo, Japan. - Duration: 1 Jan 2004 → 1 Jan 2004

Conference

Conference	The Asia-Pacific Conference of Tranducers and Micro-Nano Technology (APCOT MNT), Sapporo, Japan.
Period	1/01/04 → 1/01/04

Access to Document

https://hdl.handle.net/1783.1/11500

Cite this

@conference{d44bf4a1a04646b297f20ab7f6ac6fcc,

title = "Piezoresistive Pressure Sensor Using Metal-Induced Laterally Crystallized Polycrystalline Silicon",

author = "Gang Li and Man Wong and Yitshak Zohar",

year = "2004",

language = "English",

note = "The Asia-Pacific Conference of Tranducers and Micro-Nano Technology (APCOT MNT), Sapporo, Japan. ; Conference date: 01-01-2004 Through 01-01-2004",

}