Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation

Ming Huang Li; Chao Yu Chen; Ruochen Lu; Yansong Yang; Tao Wu; Songbin Gong

doi:10.1109/MEMSYS.2019.8870707

Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation

Ming Huang Li, Chao Yu Chen, Ruochen Lu, Yansong Yang, Tao Wu, Songbin Gong

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

12 Citations (Scopus)

Abstract

In this work, we demonstrate, for the first time, a micro-oven-integrated 170 MHz microelectromechanical systems (MEMS) resonator array implemented in a 36°-rotated-Y-Cut lithium niobate on silicon oxide (LN-OX) platform using the fundamental shear horizontal (SH0) mode. The array not only attains a high heating efficiency of 33 K/mW but also exhibits a promising electromechanical coupling coefficient ({k-{t}}^{2}) of 9.6%, a quality factor (Q) of 1360, a resulting figure of merit (\text{FoM}={k-{t}}^{2}\cdot Q) of 130, and a passively-compensated temperature coefficient of frequency (TCF) of 13.8 ppm/K. The design of the individual resonator in the array, namely a weighted 3-electrode resonator with embedded heaters on the suspended busbars, is the key to achieving the high heating efficiency while mitigating spurious modes across a wide frequency span (100-300 MHz).

Original language	English
Title of host publication	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	911-914
Number of pages	4
ISBN (Electronic)	9781728116105
DOIs	https://doi.org/10.1109/MEMSYS.2019.8870707
Publication status	Published - Jan 2019
Externally published	Yes
Event	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 27 Jan 2019 → 31 Jan 2019

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2019-January
ISSN (Print)	1084-6999

Conference

Conference	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/Territory	Korea, Republic of
City	Seoul
Period	27/01/19 → 31/01/19

Bibliographical note

Publisher Copyright:
© 2019 IEEE.

Access to Document

10.1109/MEMSYS.2019.8870707

Cite this

Li, M. H., Chen, C. Y., Lu, R., Yang, Y., Wu, T., & Gong, S. (2019). Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 911-914). Article 8870707 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870707

Li, Ming Huang ; Chen, Chao Yu ; Lu, Ruochen et al. / Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 911-914 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{7c5390b6c82b47f0b80d833a5960e509,

title = "Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation",

abstract = "In this work, we demonstrate, for the first time, a micro-oven-integrated 170 MHz microelectromechanical systems (MEMS) resonator array implemented in a 36°-rotated-Y-Cut lithium niobate on silicon oxide (LN-OX) platform using the fundamental shear horizontal (SH0) mode. The array not only attains a high heating efficiency of 33 K/mW but also exhibits a promising electromechanical coupling coefficient (\{k-\{t\}\}\textasciicircum{}\{2\}) of 9.6\%, a quality factor (Q) of 1360, a resulting figure of merit (\textbackslash{}text\{FoM\}=\{k-\{t\}\}\textasciicircum{}\{2\}\textbackslash{}cdot Q) of 130, and a passively-compensated temperature coefficient of frequency (TCF) of 13.8 ppm/K. The design of the individual resonator in the array, namely a weighted 3-electrode resonator with embedded heaters on the suspended busbars, is the key to achieving the high heating efficiency while mitigating spurious modes across a wide frequency span (100-300 MHz).",

author = "Li, \{Ming Huang\} and Chen, \{Chao Yu\} and Ruochen Lu and Yansong Yang and Tao Wu and Songbin Gong",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",

year = "2019",

month = jan,

doi = "10.1109/MEMSYS.2019.8870707",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Li, MH, Chen, CY, Lu, R, Yang, Y, Wu, T & Gong, S 2019, Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation. in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019., 8870707, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2019-January, Institute of Electrical and Electronics Engineers Inc., pp. 911-914, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 27/01/19. https://doi.org/10.1109/MEMSYS.2019.8870707

Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation. / Li, Ming Huang; Chen, Chao Yu; Lu, Ruochen et al.
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 911-914 8870707 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

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AU - Li, Ming Huang

AU - Chen, Chao Yu

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AU - Wu, Tao

AU - Gong, Songbin

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N2 - In this work, we demonstrate, for the first time, a micro-oven-integrated 170 MHz microelectromechanical systems (MEMS) resonator array implemented in a 36°-rotated-Y-Cut lithium niobate on silicon oxide (LN-OX) platform using the fundamental shear horizontal (SH0) mode. The array not only attains a high heating efficiency of 33 K/mW but also exhibits a promising electromechanical coupling coefficient ({k-{t}}^{2}) of 9.6%, a quality factor (Q) of 1360, a resulting figure of merit (\text{FoM}={k-{t}}^{2}\cdot Q) of 130, and a passively-compensated temperature coefficient of frequency (TCF) of 13.8 ppm/K. The design of the individual resonator in the array, namely a weighted 3-electrode resonator with embedded heaters on the suspended busbars, is the key to achieving the high heating efficiency while mitigating spurious modes across a wide frequency span (100-300 MHz).

AB - In this work, we demonstrate, for the first time, a micro-oven-integrated 170 MHz microelectromechanical systems (MEMS) resonator array implemented in a 36°-rotated-Y-Cut lithium niobate on silicon oxide (LN-OX) platform using the fundamental shear horizontal (SH0) mode. The array not only attains a high heating efficiency of 33 K/mW but also exhibits a promising electromechanical coupling coefficient ({k-{t}}^{2}) of 9.6%, a quality factor (Q) of 1360, a resulting figure of merit (\text{FoM}={k-{t}}^{2}\cdot Q) of 130, and a passively-compensated temperature coefficient of frequency (TCF) of 13.8 ppm/K. The design of the individual resonator in the array, namely a weighted 3-electrode resonator with embedded heaters on the suspended busbars, is the key to achieving the high heating efficiency while mitigating spurious modes across a wide frequency span (100-300 MHz).

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ER -

Li MH, Chen CY, Lu R, Yang Y, Wu T, Gong S. Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 911-914. 8870707. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2019.8870707

Power-Efficient Ovenized Lithium Niobate SH0 Resonator Arrays with Passive Temperature Compensation

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