Abstract
A profilometry using an optical stylus with interferometric readout is developed for measuring the profile of a tested surface with a large step height. A modified CD optical head provides a focal spot on the tested surface. The defocusing signal from the optical head is used to drive a PZT via a feedback controller. Both the optical head and the retroreflector of the interferometer follow the profile of the tested surface through the movement of the PZT. The profile of the tested surface can be obtained with a distance interferometer.
| Original language | English |
|---|---|
| Pages (from-to) | 546-549 |
| Number of pages | 4 |
| Journal | Measurement Science and Technology |
| Volume | 8 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - May 1997 |
| Externally published | Yes |