Abstract
High resolution patterning of single-wall carbon nanotubes is achieved using interlayer lithography. Minimum feature sizes of 6 and 0.7 μm are demonstrated on glass and silicon, using the negative photoresist SU-8 and the positive photoresist AZ7220, respectively. Films patterned using SU-8 have a good balance of transparency and sheet-resistance, and are shown to be effective electrodes for organic solar cells.
| Original language | English |
|---|---|
| Pages (from-to) | 2530-2534 |
| Number of pages | 5 |
| Journal | Small |
| Volume | 6 |
| Issue number | 22 |
| DOIs | |
| Publication status | Published - 22 Nov 2010 |
| Externally published | Yes |
Keywords
- carbon nanotubes
- interlayer lithography
- patterning
- solar cells
- spray-coating