Residual Stresses in Thin Films in Microelectronic and Microelectromechanical Systems

Tongyi Zhang

Research output: Chapter in Book/Conference Proceeding/Report › Book Chapter › peer-review

Original language	English
Title of host publication	Handbook on Residual Stress, Vol. 1
Publisher	Society for Experimental Mechanics
Pages	329-402
ISBN (Print)	9780912053912
Publication status	Published - 2005

Access to Document

@inbook{16b5c49ab644474d963d2496839cec41,

title = "Residual Stresses in Thin Films in Microelectronic and Microelectromechanical Systems",

author = "Tongyi Zhang",

year = "2005",

language = "English",

isbn = "9780912053912",

pages = "329--402",

booktitle = "Handbook on Residual Stress, Vol. 1",

publisher = "Society for Experimental Mechanics",

address = "United States",

}