Resonant spatial tracking using nanostructured resonant waveguide grating for multispectral sensing by imaging

Resonant profile shift resulting from a change of resonant conditions is classically used for sensing, either liquid refractive index or immobilized biological layer effective thickness. Resonant waveguide gratings (RWG) allow sensing over a large spectral domain, depending on the materials and geometrical parameters of the grating. Profiles measurements usually involve scanning instrumentation. We recently demonstrated that direct imaging multi-assay RWGs sensing may be rendered more robust using spatial Fano profiles from "chirped" RWG chips. The scheme circumvents the classical but demanding scans: instead of varying angle or wavelength through fragile moving parts or special optics, a RWG structure parameter is varied. Our findings are illustrated with resonance profiles from nanostructured silicon nitride waveguide on glass. A sensitivity down to Δn=2x10^-5 or biomolecules mass density of 10 pg/mm² is demonstrated through theory and experiments. To assess different sensing wavelength, the period might also vary within the same chip support. We discuss guiding properties and sensing sensitivities of RWG sensing over the whole visible spectral range. Resonant profiles are analyzed using a correlation approach, correlating the sensed signal to a zero-shifted reference signal. This analysis was demonstrated to be more accurate than usual fitting, for analyzing signals including noise contribution. The current success of surface plasmon imaging suggests that our work could leverage an untapped potential to extend such techniques in a convenient and sturdy optical configuration. Moreover, extended spectral range sensing can be addressed by dielectric waveguide structures. This allows sensitive sensing of small volumes of analyte, which can be circulated close from the resonant waveguide. Together with the demonstration of highly accurate fits through correlation analysis, our scheme based on a "Peak-tracking chip" demonstrates a new technique for multispectral sensitive sensing through nanostructured chip imaging.