Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate

Ahmed Emad; Ruochen Lu; Ming Huang Li; Yansong Yang; Tao Wu; Songbin Gong

doi:10.1109/MEMSYS.2019.8870894

Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate

Ahmed Emad, Ruochen Lu, Ming Huang Li, Yansong Yang, Tao Wu, Songbin Gong

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

11 Citations (Scopus)

Abstract

This paper reports the first torsional micro-actuator using a lithium niobate (LiNbO₃, 36° Y-cut) thin film with a record-high figure of merit (\mathrm{FoM}=\theta-{opt}\cdot \text{mirror dimension}\cdot \mathrm{frequency}) of 1582 °·mm·kHz at a resonance frequency of 1.268 MHz. The large piezoelectric coefficients and high-quality factors of single crystal LiNbO₃ have been exploited to enable high coupling torsional actuation. The fabricated actuator has a mirror size of 22\mathrm{x}40\ \mu \mathrm{m} {2}, and quality factors of 547 and 1497 in air and vacuum respectively. Moreover, the optical angle can exceed 31 {\circ}\ (\theta-{opt}= 4\cdot\theta-{mech}) in both air and vacuum, leading to an FoM surpassing state-of-the-art high-frequency scanners. Our demonstration has shown great potential for scanning micro-mirrors, and light detection and ranging systems (LIDAR) applications where frequency scalability, scanning angles, and footprint are the main challenges.

Original language	English
Title of host publication	2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	282-285
Number of pages	4
ISBN (Electronic)	9781728116105
DOIs	https://doi.org/10.1109/MEMSYS.2019.8870894
Publication status	Published - Jan 2019
Externally published	Yes
Event	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 27 Jan 2019 → 31 Jan 2019

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2019-January
ISSN (Print)	1084-6999

Conference

Conference	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/Territory	Korea, Republic of
City	Seoul
Period	27/01/19 → 31/01/19

Bibliographical note

Publisher Copyright:
© 2019 IEEE.

Access to Document

10.1109/MEMSYS.2019.8870894

Cite this

Emad, A., Lu, R., Li, M. H., Yang, Y., Wu, T., & Gong, S. (2019). Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019 (pp. 282-285). Article 8870894 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2019.8870894

Emad, Ahmed ; Lu, Ruochen ; Li, Ming Huang et al. / Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate. 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 282-285 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{481746f1eaaa4f59be2921ffa79b2f0d,

title = "Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate",

abstract = "This paper reports the first torsional micro-actuator using a lithium niobate (LiNbO3, 36° Y-cut) thin film with a record-high figure of merit (\textbackslash{}mathrm\{FoM\}=\textbackslash{}theta-\{opt\}\textbackslash{}cdot \textbackslash{}text\{mirror dimension\}\textbackslash{}cdot \textbackslash{}mathrm\{frequency\}) of 1582 °·mm·kHz at a resonance frequency of 1.268 MHz. The large piezoelectric coefficients and high-quality factors of single crystal LiNbO3 have been exploited to enable high coupling torsional actuation. The fabricated actuator has a mirror size of 22\textbackslash{}mathrm\{x\}40\textbackslash{} \textbackslash{}mu \textbackslash{}mathrm\{m\} \{2\}, and quality factors of 547 and 1497 in air and vacuum respectively. Moreover, the optical angle can exceed 31 \{\textbackslash{}circ\}\textbackslash{} (\textbackslash{}theta-\{opt\}= 4\textbackslash{}cdot\textbackslash{}theta-\{mech\}) in both air and vacuum, leading to an FoM surpassing state-of-the-art high-frequency scanners. Our demonstration has shown great potential for scanning micro-mirrors, and light detection and ranging systems (LIDAR) applications where frequency scalability, scanning angles, and footprint are the main challenges.",

author = "Ahmed Emad and Ruochen Lu and Li, \{Ming Huang\} and Yansong Yang and Tao Wu and Songbin Gong",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",

year = "2019",

month = jan,

doi = "10.1109/MEMSYS.2019.8870894",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Emad, A, Lu, R, Li, MH, Yang, Y, Wu, T & Gong, S 2019, Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate. in 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019., 8870894, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2019-January, Institute of Electrical and Electronics Engineers Inc., pp. 282-285, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 27/01/19. https://doi.org/10.1109/MEMSYS.2019.8870894

Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate. / Emad, Ahmed; Lu, Ruochen; Li, Ming Huang et al.
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 282-285 8870894 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2019-January).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

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T1 - Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate

AU - Emad, Ahmed

AU - Lu, Ruochen

AU - Li, Ming Huang

AU - Yang, Yansong

AU - Wu, Tao

AU - Gong, Songbin

PY - 2019/1

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N2 - This paper reports the first torsional micro-actuator using a lithium niobate (LiNbO3, 36° Y-cut) thin film with a record-high figure of merit (\mathrm{FoM}=\theta-{opt}\cdot \text{mirror dimension}\cdot \mathrm{frequency}) of 1582 °·mm·kHz at a resonance frequency of 1.268 MHz. The large piezoelectric coefficients and high-quality factors of single crystal LiNbO3 have been exploited to enable high coupling torsional actuation. The fabricated actuator has a mirror size of 22\mathrm{x}40\ \mu \mathrm{m} {2}, and quality factors of 547 and 1497 in air and vacuum respectively. Moreover, the optical angle can exceed 31 {\circ}\ (\theta-{opt}= 4\cdot\theta-{mech}) in both air and vacuum, leading to an FoM surpassing state-of-the-art high-frequency scanners. Our demonstration has shown great potential for scanning micro-mirrors, and light detection and ranging systems (LIDAR) applications where frequency scalability, scanning angles, and footprint are the main challenges.

AB - This paper reports the first torsional micro-actuator using a lithium niobate (LiNbO3, 36° Y-cut) thin film with a record-high figure of merit (\mathrm{FoM}=\theta-{opt}\cdot \text{mirror dimension}\cdot \mathrm{frequency}) of 1582 °·mm·kHz at a resonance frequency of 1.268 MHz. The large piezoelectric coefficients and high-quality factors of single crystal LiNbO3 have been exploited to enable high coupling torsional actuation. The fabricated actuator has a mirror size of 22\mathrm{x}40\ \mu \mathrm{m} {2}, and quality factors of 547 and 1497 in air and vacuum respectively. Moreover, the optical angle can exceed 31 {\circ}\ (\theta-{opt}= 4\cdot\theta-{mech}) in both air and vacuum, leading to an FoM surpassing state-of-the-art high-frequency scanners. Our demonstration has shown great potential for scanning micro-mirrors, and light detection and ranging systems (LIDAR) applications where frequency scalability, scanning angles, and footprint are the main challenges.

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BT - 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019

Y2 - 27 January 2019 through 31 January 2019

ER -

Emad A, Lu R, Li MH, Yang Y, Wu T, Gong S. Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate. In 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems, MEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 282-285. 8870894. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2019.8870894

Resonant Torsional Micro-Actuators Using Thin-Film Lithium Niobate

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