TY - JOUR
T1 - Room temperature laser deposited indium tin oxide films for display applications
AU - Yip, W. C.
AU - Bhat, A. Gururaj
AU - Kwok, H. S.
PY - 1994
Y1 - 1994
N2 - Indium tin oxide is the most basic transparent electrode material for all flat panel displays. Commercial ITO glass is manufactured mostly by sputtering. Here, we report the use of pulsed laser deposition to produce ITO thin films on glass at room temperature. Several interesting properties of such films were observed. (1) It was found that the resistivity of 0.5mΩ-cm compared very well with the best published values produced at high deposition temperatures. Room temperature deposition affords the possibility of using plastics and other flexible substrates for displays. (2) The microstructure of these ITO films were quite different from those of commercial ITO glasses. (3) By passing a strong current through the film, a large thermally induced Δnl could be observed. This change was due to lateral stress and could be as large as 1μm for a 1-μm thick film. An electro-optic shutter can easily be designed with such films. Applications of this electronically controlled Δnl to display technology are discussed.
AB - Indium tin oxide is the most basic transparent electrode material for all flat panel displays. Commercial ITO glass is manufactured mostly by sputtering. Here, we report the use of pulsed laser deposition to produce ITO thin films on glass at room temperature. Several interesting properties of such films were observed. (1) It was found that the resistivity of 0.5mΩ-cm compared very well with the best published values produced at high deposition temperatures. Room temperature deposition affords the possibility of using plastics and other flexible substrates for displays. (2) The microstructure of these ITO films were quite different from those of commercial ITO glasses. (3) By passing a strong current through the film, a large thermally induced Δnl could be observed. This change was due to lateral stress and could be as large as 1μm for a 1-μm thick film. An electro-optic shutter can easily be designed with such films. Applications of this electronically controlled Δnl to display technology are discussed.
UR - https://www.webofscience.com/wos/woscc/full-record/WOS:A1994BC30K00038
UR - https://openalex.org/W2322414200
UR - https://www.scopus.com/pages/publications/0028730648
U2 - 10.1557/proc-345-261
DO - 10.1557/proc-345-261
M3 - Conference article published in journal
SN - 0272-9172
VL - 345
SP - 261
EP - 265
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
T2 - Proceedings of the 1994 MRS Spring Meeting
Y2 - 5 April 1994 through 6 April 1994
ER -