Self-Aligned Hybrid-Phase Micro-Structural ITO-Stabilized ZnO TFTs Achieved via a Combination of PECVD Processes

Guijun Li, Rongsheng Chen, Sunbin Deng, Hoi Sing Kwok, Man Wong, Zhihe Xia, Meng Zhang, Wei Zhou

Research output: Contribution to conference › Conference Paper › peer-review

Original language	English
Publication status	Published - Sept 2017
Event	Proceedings of the International Display Manufacturing Conference (IDMC) - Duration: 1 Sept 2017 → 1 Sept 2017

Conference	Proceedings of the International Display Manufacturing Conference (IDMC)
Period	1/09/17 → 1/09/17

Access to Document

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title = "Self-Aligned Hybrid-Phase Micro-Structural ITO-Stabilized ZnO TFTs Achieved via a Combination of PECVD Processes",

author = "Guijun Li and Rongsheng Chen and Sunbin Deng and Kwok, \{Hoi Sing\} and Man Wong and Zhihe Xia and Meng Zhang and Wei Zhou",

year = "2017",

month = sep,

language = "English",

note = "Proceedings of the International Display Manufacturing Conference (IDMC) ; Conference date: 01-09-2017 Through 01-09-2017",

}

TY - CONF

T1 - Self-Aligned Hybrid-Phase Micro-Structural ITO-Stabilized ZnO TFTs Achieved via a Combination of PECVD Processes

AU - Li, Guijun

AU - Chen, Rongsheng

AU - Deng, Sunbin

AU - Kwok, Hoi Sing

AU - Wong, Man

AU - Xia, Zhihe

AU - Zhang, Meng

AU - Zhou, Wei

PY - 2017/9

Y1 - 2017/9

M3 - Conference Paper

T2 - Proceedings of the International Display Manufacturing Conference (IDMC)

Y2 - 1 September 2017 through 1 September 2017

ER -