Short-channel Elevated-metal Metal-oxide (EMMO) Thin-film Transistor with Dehydrogenated Passivation Etch-stop Layer

nannan Lv, Sarah Bebiche, Zhuoqun Feng, Hoi Sing Kwok, Jiapeng Li, Lei Lu, Sisi Wang, Man Wong^*, Zhihe Xia

^*Corresponding author for this work

Research output: Contribution to conference › Conference Paper › peer-review

Original language	English
Publication status	Published - Sept 2017
Event	Proceedings of the International Display Manufacturing Conference (IDMC'17) - Duration: 1 Sept 2017 → 1 Sept 2017

Conference	Proceedings of the International Display Manufacturing Conference (IDMC'17)
Period	1/09/17 → 1/09/17

Access to Document

@conference{6326add11e784e999945b2e002e7a05d,

title = "Short-channel Elevated-metal Metal-oxide (EMMO) Thin-film Transistor with Dehydrogenated Passivation Etch-stop Layer",

author = "nannan Lv and Sarah Bebiche and Zhuoqun Feng and Kwok, \{Hoi Sing\} and Jiapeng Li and Lei Lu and Sisi Wang and Man Wong and Zhihe Xia",

year = "2017",

month = sep,

language = "English",

note = "Proceedings of the International Display Manufacturing Conference (IDMC'17) ; Conference date: 01-09-2017 Through 01-09-2017",

}

TY - CONF

T1 - Short-channel Elevated-metal Metal-oxide (EMMO) Thin-film Transistor with Dehydrogenated Passivation Etch-stop Layer

AU - Lv, nannan

AU - Bebiche, Sarah

AU - Feng, Zhuoqun

AU - Kwok, Hoi Sing

AU - Li, Jiapeng

AU - Lu, Lei

AU - Wang, Sisi

AU - Wong, Man

AU - Xia, Zhihe

PY - 2017/9

Y1 - 2017/9

M3 - Conference Paper

T2 - Proceedings of the International Display Manufacturing Conference (IDMC'17)

Y2 - 1 September 2017 through 1 September 2017

ER -