Soft-lithography-based high temperature molding method to fabricate whole teflon microfluidic chips

K. N. Ren; Y. Z. Zheng; W. Dai; D. Ryan; C. Y. Fung; H. K. Wu

Soft-lithography-based high temperature molding method to fabricate whole teflon microfluidic chips

K. N. Ren, Y. Z. Zheng, W. Dai, D. Ryan, C. Y. Fung, H. K. Wu^*

^*Corresponding author for this work

Department of Chemical and Biological Engineering

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

9 Citations (Scopus)

Abstract

In this work, we present a high-temperature (up to 350 °C) thermal molding method using PDMS master to fabricate microstructures (e.g., high-aspect-ratio and 3D) in Teflon with high resolution and fidelity at down to sub-micron scale. In addition, we demonstrate a convenient strategy for bonding Teflon plates and can easily fabricate whole Teflon microfluidic chips, which are extremely chemical-inert, anti-fouling and biocompatible.

Original language	English
Title of host publication	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Pages	554-556
Number of pages	3
Publication status	Published - 2010
Event	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands Duration: 3 Oct 2010 → 7 Oct 2010

Publication series

Name	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Volume	1

Conference

Conference	14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Country/Territory	Netherlands
City	Groningen
Period	3/10/10 → 7/10/10

Keywords

Chemical-resistant microfluidic chip
PDMS
Soft-lithography
Teflon PFA

Cite this

Ren, K. N., Zheng, Y. Z., Dai, W., Ryan, D., Fung, C. Y., & Wu, H. K. (2010). Soft-lithography-based high temperature molding method to fabricate whole teflon microfluidic chips. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 (pp. 554-556). (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; Vol. 1).

Ren, K. N. ; Zheng, Y. Z. ; Dai, W. et al. / Soft-lithography-based high temperature molding method to fabricate whole teflon microfluidic chips. 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. 2010. pp. 554-556 (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010).

@inproceedings{44d261e02f5148ee8548aeb829617041,

title = "Soft-lithography-based high temperature molding method to fabricate whole teflon microfluidic chips",

abstract = "In this work, we present a high-temperature (up to 350 °C) thermal molding method using PDMS master to fabricate microstructures (e.g., high-aspect-ratio and 3D) in Teflon with high resolution and fidelity at down to sub-micron scale. In addition, we demonstrate a convenient strategy for bonding Teflon plates and can easily fabricate whole Teflon microfluidic chips, which are extremely chemical-inert, anti-fouling and biocompatible.",

keywords = "Chemical-resistant microfluidic chip, PDMS, Soft-lithography, Teflon PFA",

author = "Ren, \{K. N.\} and Zheng, \{Y. Z.\} and W. Dai and D. Ryan and Fung, \{C. Y.\} and Wu, \{H. K.\}",

year = "2010",

language = "English",

isbn = "9781618390622",

series = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010",

pages = "554--556",

booktitle = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010",

note = "14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 ; Conference date: 03-10-2010 Through 07-10-2010",

}

Ren, KN, Zheng, YZ, Dai, W, Ryan, D, Fung, CY & Wu, HK 2010, Soft-lithography-based high temperature molding method to fabricate whole teflon microfluidic chips. in 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010, vol. 1, pp. 554-556, 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010, Groningen, Netherlands, 3/10/10.

Soft-lithography-based high temperature molding method to fabricate whole teflon microfluidic chips. / Ren, K. N.; Zheng, Y. Z.; Dai, W. et al.
14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. 2010. p. 554-556 (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; Vol. 1).

Research output: Chapter in Book/Conference Proceeding/Report › Conference Paper published in a book › peer-review

TY - GEN

T1 - Soft-lithography-based high temperature molding method to fabricate whole teflon microfluidic chips

AU - Ren, K. N.

AU - Zheng, Y. Z.

AU - Dai, W.

AU - Ryan, D.

AU - Fung, C. Y.

AU - Wu, H. K.

PY - 2010

Y1 - 2010

N2 - In this work, we present a high-temperature (up to 350 °C) thermal molding method using PDMS master to fabricate microstructures (e.g., high-aspect-ratio and 3D) in Teflon with high resolution and fidelity at down to sub-micron scale. In addition, we demonstrate a convenient strategy for bonding Teflon plates and can easily fabricate whole Teflon microfluidic chips, which are extremely chemical-inert, anti-fouling and biocompatible.

AB - In this work, we present a high-temperature (up to 350 °C) thermal molding method using PDMS master to fabricate microstructures (e.g., high-aspect-ratio and 3D) in Teflon with high resolution and fidelity at down to sub-micron scale. In addition, we demonstrate a convenient strategy for bonding Teflon plates and can easily fabricate whole Teflon microfluidic chips, which are extremely chemical-inert, anti-fouling and biocompatible.

KW - Chemical-resistant microfluidic chip

KW - PDMS

KW - Soft-lithography

KW - Teflon PFA

UR - https://www.scopus.com/pages/publications/84884297204

M3 - Conference Paper published in a book

AN - SCOPUS:84884297204

SN - 9781618390622

T3 - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010

SP - 554

EP - 556

BT - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010

T2 - 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010

Y2 - 3 October 2010 through 7 October 2010

ER -

Ren KN, Zheng YZ, Dai W, Ryan D, Fung CY, Wu HK. Soft-lithography-based high temperature molding method to fabricate whole teflon microfluidic chips. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010. 2010. p. 554-556. (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010).

Soft-lithography-based high temperature molding method to fabricate whole teflon microfluidic chips

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