The impact of device parameter variation on double gate tunneling FET and double gate MOSFET

Lining Zhang*, Mansun Chan, Frank He

*Corresponding author for this work

Research output: Chapter in Book/Conference Proceeding/ReportConference Paper published in a bookpeer-review

14 Citations (Scopus)

Abstract

Impacts of parameter variations on the performance of double-gate (DG) tunneling FET (TFET) and conventional DG MOSFET are investigated by TCAD simulations. The different operation mechanisms determined their sensitivities to parameter variations. Variations in channel doping concentrations, gate oxide thickness, silicon film thickness and offset of gate electrode are studied in this work. It is found that though TFET overcomes the minimum subthreshold swing (SS) limit in conventional MOSFET, it is more sensitive to parameter variation, especially to gate oxide and silicon film thickness.

Original languageEnglish
Title of host publication2010 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2010
DOIs
Publication statusPublished - 2010
Event2010 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2010 - Hong Kong, China
Duration: 15 Dec 201017 Dec 2010

Publication series

Name2010 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2010

Conference

Conference2010 IEEE International Conference of Electron Devices and Solid-State Circuits, EDSSC 2010
Country/TerritoryChina
CityHong Kong
Period15/12/1017/12/10

Keywords

  • Band to band tunneling
  • Double gate (DG)
  • Tunneling FET
  • Variation

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