Abstract
A thermal microsystem, integrated with pressure and temperature microsensors, is fabricated to study single-phase liquid flow forced convection under uniform heat flux boundary condition. Standard micromachining techniques were utilized in the fabrication of the integrated microsystem. Utilizing a waferbond-and-etch-back technology, the heat source, temperature and pressure sensors are separated from the fluid flow by a 1.5μm thick composite membrane; thus, allowing experimentally good control of the thermal boundary conditions. A threedimensional numerical simulation model has been constructed to investigate the heat flux distribution. The results show that upstream the cold working fluid absorbs heat, while downstream the warmer working fluid releases heat. The Nusselt number is calculated based on the computations, which are compared with analytical and experimental results. The wall Nusselt number in a microchannel can only be estimated by conventional analytical solution in a limited Reynolds number range. The estimated Nusselt number for forced convection is found to be highly dependent on the location of the temperature measurements.
| Original language | English |
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| Title of host publication | Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 |
| Pages | 502-506 |
| Number of pages | 5 |
| DOIs | |
| Publication status | Published - 2007 |
| Event | 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 - Bangkok, Thailand Duration: 16 Jan 2007 → 19 Jan 2007 |
Publication series
| Name | Proceedings of the 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 |
|---|
Conference
| Conference | 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2007 |
|---|---|
| Country/Territory | Thailand |
| City | Bangkok |
| Period | 16/01/07 → 19/01/07 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
Keywords
- Forced convection
- Microchannel
- Nusselt number
- Single-phase liquid flow
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