The testing method of mechanical properties of thin films

The present work summarizes the novel experimental methods recently developed to characterize the mechanical properties of thin films. These methods include the nanoindentation test, the indentation fracture technique, the micro-rotating-structure indicator, the bending test of microcantilever beams, the microbridge test, and the bulge test. The features and merits of these experimental methods are described in detail. The mechanical properties of thin films, such as residual stresses, Young's modulus, fracture strength, hardness, and etc, characterized by these methods are also briefly introduced.