| Original language | English |
|---|---|
| IPC | H01L 31/0216, H01L 31/073, H01L 31/18 |
| Priority date | 21/11/13 |
| Filing date | 21/11/14 |
| Publication status | Published - 6 Oct 2016 |
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Three Dimensional Anti-Reflection Nanocone Film
Zhiyong FAN (Key Inventor), Kwong Hoi TSUI (Inventor), Qingfeng LIN (Inventor)
Research output: Patent