Time-resolved investigation of sidewall damage in dry-etched InGaN/GaN micropillars

Kwan H. Lee, Shuji Nakamura, Rajat S. Sharma, Kam Sing Wong, Yongchun Zhong

Research output: Contribution to conference › Conference Paper

Original language	English
Publication status	Published - 2007
Event	20th Annual Conference of the Physical Society of Hong Kong, PSHK, Hong Kong - Duration: 1 Jan 2007 → 1 Jan 2007

Conference	20th Annual Conference of the Physical Society of Hong Kong, PSHK, Hong Kong
Period	1/01/07 → 1/01/07

Access to Document

@conference{68c2eba42149427cb2c38318068a1596,

title = "Time-resolved investigation of sidewall damage in dry-etched InGaN/GaN micropillars",

author = "Lee, \{Kwan H.\} and Shuji Nakamura and Sharma, \{Rajat S.\} and Wong, \{Kam Sing\} and Yongchun Zhong",

year = "2007",

language = "English",

note = "20th Annual Conference of the Physical Society of Hong Kong, PSHK, Hong Kong ; Conference date: 01-01-2007 Through 01-01-2007",

}

TY - CONF

T1 - Time-resolved investigation of sidewall damage in dry-etched InGaN/GaN micropillars

AU - Lee, Kwan H.

AU - Nakamura, Shuji

AU - Sharma, Rajat S.

AU - Wong, Kam Sing

AU - Zhong, Yongchun

PY - 2007

Y1 - 2007

M3 - Conference Paper

T2 - 20th Annual Conference of the Physical Society of Hong Kong, PSHK, Hong Kong

Y2 - 1 January 2007 through 1 January 2007

ER -