TY - GEN
T1 - Tunable on-chip inductors up to 5 GHz using patterned permalloy laminations
AU - Salvia, James
AU - Bain, James A.
AU - Yue, C. Patrick
PY - 2005
Y1 - 2005
N2 - This paper presents the design criteria, processing techniques, and measurement results for an on-chip inductor that uses a permalloy (Ni 80Fe20) film to achieve a tunable reactance. Eddy currents and ferromagnetic resonance are suppressed in the thin permalloy film using patterning and laminations to enable operation in the RF range. Measurements results show a 40% increase in inductance, a 15% tuning range, and a Q between 5 and 11 up to 5 GHz.
AB - This paper presents the design criteria, processing techniques, and measurement results for an on-chip inductor that uses a permalloy (Ni 80Fe20) film to achieve a tunable reactance. Eddy currents and ferromagnetic resonance are suppressed in the thin permalloy film using patterning and laminations to enable operation in the RF range. Measurements results show a 40% increase in inductance, a 15% tuning range, and a Q between 5 and 11 up to 5 GHz.
UR - https://www.scopus.com/pages/publications/33847749877
M3 - Conference Paper published in a book
AN - SCOPUS:33847749877
SN - 078039268X
SN - 9780780392687
T3 - Technical Digest - International Electron Devices Meeting, IEDM
SP - 943
EP - 946
BT - IEEE International Electron Devices Meeting, 2005 IEDM - Technical Digest
T2 - IEEE International Electron Devices Meeting, 2005 IEDM
Y2 - 5 December 2005 through 7 December 2005
ER -