Abstract
Corrugated silicon nitride masks (SiNMs) of 2000 ppi are developed to reduce the shadowing effect in direct patterning of high-resolution, RGB side-by-side OLED microdisplays. Periodic corrugations in the free-standing silicon nitride membrane elevate the through-apertures and reduce the gap between the mask and the substrate.
| Original language | English |
|---|---|
| Pages (from-to) | 1192-1195 |
| Number of pages | 4 |
| Journal | Digest of Technical Papers - SID International Symposium |
| Volume | 54 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 2023 |
| Event | SID International Symposium Digest of Technical Papers, 2023 - Los Angeles, United States Duration: 21 May 2023 → 26 May 2023 |
Bibliographical note
Publisher Copyright:© 2023, John Wiley and Sons Inc. All rights reserved.
Keywords
- Direct patterning
- OLED microdisplay
- Shadow mask
- Silicon nitride
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