Vertical Ga2O3 Schottky barrier diodes with guard ring formed by nitrogen-ion implantation

Tatsuro Watahiki, Mikio Yamamuka, Yohei Yuda, Masataka Higashiwaki, Chia-Hung Lin, Man Hoi Wong, Keita Konishi, Yoshinao Kumagai, Sato Mayuko, Hisashi Murakami, Nao Takekawa

Research output: Contribution to conferenceConference Paperpeer-review

Original languageEnglish
Publication statusPublished - 2019
Externally publishedYes
Event46th International Symposium on Compound Semiconductors (ISCS 2019), in Compound Semiconductor Week 2019 (CSW 2019) -
Duration: 1 Jan 20191 Jan 2019

Conference

Conference46th International Symposium on Compound Semiconductors (ISCS 2019), in Compound Semiconductor Week 2019 (CSW 2019)
Period1/01/191/01/19

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