Abstract
We report the first waveguide-coupled round-corner octagonal microresonator channel add-drop filters on silicon-nitride-on-silica substrates. By using photolithography and plasma etching, we fabricated a waveguide-coupled 50-micron sized octagonal microresonator with 15-micron radius round corners. Our experiment reveals TM-polarized whispering-gallery-like modes with a Q of about 3800 and a finesse of 18.
| Original language | English |
|---|---|
| Title of host publication | Frontiers in Optics, FiO-2004 |
| Publisher | Optica Publishing Group (formerly OSA) |
| ISBN (Electronic) | 1557527792 |
| Publication status | Published - 2004 |
| Event | Frontiers in Optics, FiO-2004 - Rochester, United States Duration: 12 Oct 2004 → … |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| ISSN (Electronic) | 2162-2701 |
Conference
| Conference | Frontiers in Optics, FiO-2004 |
|---|---|
| Country/Territory | United States |
| City | Rochester |
| Period | 12/10/04 → … |
Bibliographical note
Publisher Copyright:© 2004 OSA/FIO 2004
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